{"id":4273,"date":"2025-02-28T15:23:11","date_gmt":"2025-02-28T08:23:11","guid":{"rendered":"https:\/\/labantrithuc.com\/?p=4273"},"modified":"2025-02-28T15:23:11","modified_gmt":"2025-02-28T08:23:11","slug":"thiet-bi-quang-khac-tien-tien-ky-4","status":"publish","type":"post","link":"https:\/\/labantrithuc.com\/?p=4273","title":{"rendered":"Thi\u1ebft b\u1ecb quang kh\u1eafc ti\u00ean ti\u1ebfn (K\u1ef3 4)"},"content":{"rendered":"\n<blockquote class=\"wp-block-quote is-layout-flow wp-block-quote-is-layout-flow\">\n<p>Hu\u1ef3nh C\u00f4ng T\u00fa<\/p>\n<\/blockquote>\n\n\n\n<p>\u1ede th\u1eddi \u0111i\u1ec3m hi\u1ec7n t\u1ea1i, <strong>ASML<\/strong> (H\u00e0 Lan) l\u00e0 h\u00e3ng d\u1eabn \u0111\u1ea7u th\u1ecb tr\u01b0\u1eddng thi\u1ebft b\u1ecb quang kh\u1eafc, \u0111\u1eb7c bi\u1ec7t trong m\u1ea3ng EUV. C\u00e1c h\u1ec7 th\u1ed1ng m\u00e1y quang kh\u1eafc hi\u1ec7n \u0111\u1ea1i l\u00e0 nh\u1eefng c\u1ed7 m\u00e1y tinh vi b\u1eadc nh\u1ea5t m\u00e0 con ng\u01b0\u1eddi ch\u1ebf t\u1ea1o, v\u1edbi gi\u00e1 th\u00e0nh v\u00e0 quy m\u00f4 kh\u1ed5ng l\u1ed3. \u0110\u1ed3ng th\u1eddi, cu\u1ed9c c\u1ea1nh tranh c\u00f4ng ngh\u1ec7 gi\u1eefa c\u00e1c nh\u00e0 cung c\u1ea5p thi\u1ebft b\u1ecb (ASML, Nikon, Canon) v\u00e0 s\u1ef1 tr\u1ed7i d\u1eady c\u1ee7a nh\u1eefng ph\u01b0\u01a1ng ph\u00e1p quang kh\u1eafc thay th\u1ebf (X-ray, nanoimprint) c\u0169ng l\u00e0 \u0111i\u1ec3m \u0111\u00e1ng ch\u00fa \u00fd.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1020\" height=\"612\" src=\"https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image.png\" alt=\"\" class=\"wp-image-4261\" srcset=\"https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image.png 1020w, https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image-300x180.png 300w, https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image-768x461.png 768w\" sizes=\"auto, (max-width: 1020px) 100vw, 1020px\" \/><\/figure>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading_5a10a3-ac, .wp-block-kadence-advancedheading.kt-adv-heading_5a10a3-ac[data-kb-block=\"kb-adv-heading_5a10a3-ac\"]{font-style:normal;}.wp-block-kadence-advancedheading.kt-adv-heading_5a10a3-ac mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading_5a10a3-ac[data-kb-block=\"kb-adv-heading_5a10a3-ac\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}<\/style>\n<h5 class=\"kt-adv-heading_5a10a3-ac wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading_5a10a3-ac\"><strong>M\u00e1y quang kh\u1eafc EUV c\u1ee7a ASML \u2013 k\u1ef3 quan c\u00f4ng ngh\u1ec7 hi\u1ec7n \u0111\u1ea1i<\/strong><\/h5>\n\n\n\n<p>M\u00e1y quang kh\u1eafc EUV do ASML s\u1ea3n xu\u1ea5t (d\u00f2ng <strong>TWINSCAN NXE<\/strong> v\u00e0 s\u1eafp t\u1edbi l\u00e0 EXE High-NA) \u0111\u01b0\u1ee3c coi l\u00e0 <strong>\u201ctr\u00e1i tim\u201d<\/strong> c\u1ee7a c\u00e1c fab b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn. Ch\u00fang c\u00f3 c\u1ea5u tr\u00fac kh\u1ed5ng l\u1ed3 \u2013 n\u1eb7ng g\u1ea7n <strong>200 t\u1ea5n<\/strong> (k\u00edch c\u1ee1 t\u01b0\u01a1ng \u0111\u01b0\u01a1ng m\u1ed9t chi\u1ebfc xe t\u1ea3i l\u1edbn) v\u00e0 khi v\u1eadn chuy\u1ec3n c\u1ea7n \u0111\u1ebfn 3 chi\u1ebfc Boeing 747 \u0111\u1ec3 ch\u1edf linh ki\u1ec7n\u200b. M\u1ed7i h\u1ec7 th\u1ed1ng g\u1ed3m h\u00e0ng tr\u0103m ng\u00e0n b\u1ed9 ph\u1eadn, trong \u0111\u00f3 c\u00f3 nh\u1eefng th\u00e0nh ph\u1ea7n ch\u1ee7 ch\u1ed1t nh\u01b0: ngu\u1ed3n laser CO2 40kW b\u1eafn v\u00e0o c\u00e1c gi\u1ecdt thi\u1ebfc t\u1ea1o plasma ph\u00e1t EUV, b\u1ed9 g\u01b0\u01a1ng nhi\u1ec1u l\u1edbp c\u1ee7a <strong>Zeiss<\/strong> v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c b\u1ec1 m\u1eb7t t\u00ednh b\u1eb1ng t\u1eebng nguy\u00ean t\u1eed, bu\u1ed3ng ch\u00e2n kh\u00f4ng, b\u00e0n stage di \u0111\u1ed9ng si\u00eau nhanh, v\u00e0 h\u1ec7 th\u1ed1ng c\u0103n ch\u1ec9nh, ki\u1ec3m so\u00e1t quang h\u1ecdc ph\u1ee9c t\u1ea1p. Nh\u1edd h\u1ee3p t\u00e1c v\u1edbi Zeiss (\u0110\u1ee9c) v\u00e0 c\u00e1c \u0111\u1ed1i t\u00e1c, ASML \u0111\u00e3 th\u01b0\u01a1ng m\u1ea1i h\u00f3a EUV sau h\u01a1n 20 n\u0103m nghi\u00ean c\u1ee9u, \u0111\u1ebfn m\u1ee9c MIT Technology Review g\u1ecdi \u0111\u00e2y l\u00e0 \u201cc\u1ed7 m\u00e1y c\u1ee9u r\u1ed7i \u0110\u1ecbnh lu\u1eadt Moore\u201d\u200b.<\/p>\n\n\n\n<p>V\u1ec1 kh\u1ea3 n\u0103ng, m\u00e1y EUV hi\u1ec7n \u0111\u1ea1i (v\u00ed d\u1ee5 NXE:3400C) c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u1ed9 ph\u00e2n gi\u1ea3i kho\u1ea3ng 13 nm, n\u0103ng su\u1ea5t ~170 wafer\/gi\u1edd\u200b. \u0110\u1ed9 ch\u00ednh x\u00e1c v\u1ecb tr\u00ed ch\u00f9m tia \u1edf c\u1ea5p sub-nm. M\u1ed7i wafer th\u01b0\u1eddng c\u1ea7n ph\u01a1i ~20-30 l\u1edbp kh\u00e1c nhau, do \u0111\u00f3 fab ti\u00ean ti\u1ebfn th\u01b0\u1eddng ph\u1ea3i trang b\u1ecb nhi\u1ec1u m\u00e1y EUV (v\u00ed d\u1ee5 ~10 m\u00e1y cho 45k wafer\/th\u00e1ng v\u1edbi 10 l\u1edbp EUV m\u1ed7i wafer)\u200b. T\u00ednh \u0111\u1ebfn n\u0103m 2022, ASML \u0111\u00e3 xu\u1ea5t x\u01b0\u1edfng kho\u1ea3ng <strong>140 h\u1ec7 th\u1ed1ng EUV<\/strong> tr\u00ean to\u00e0n th\u1ebf gi\u1edbi\u200b. Kh\u00e1ch h\u00e0ng ch\u00ednh bao g\u1ed3m TSMC, Samsung, Intel \u2013 nh\u1eefng h\u00e3ng duy nh\u1ea5t \u0111\u1ee7 kh\u1ea3 n\u0103ng \u0111\u1ea7u t\u01b0 nh\u1eefng c\u1ed7 m\u00e1y \u0111\u1eaft \u0111\u1ecf n\u00e0y. ASML hi\u1ec7n g\u1ea7n nh\u01b0 <strong>\u0111\u1ed9c quy\u1ec1n<\/strong> trong l\u0129nh v\u1ef1c EUV (Nikon v\u00e0 Canon kh\u00f4ng c\u00f3 s\u1ea3n ph\u1ea9m c\u1ea1nh tranh tr\u1ef1c ti\u1ebfp)\u200b.<\/p>\n\n\n\n<p><strong>Gi\u00e1 th\u00e0nh v\u00e0 quy m\u00f4 s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb:<\/strong> M\u1ed7i m\u00e1y EUV c\u00f3 gi\u00e1 kho\u1ea3ng <strong>$150\u2013200 tri\u1ec7u USD<\/strong> (model m\u1edbi nh\u1ea5t NXE:3600D l\u00ean t\u1edbi $200M\u200b). V\u1edbi d\u00f2ng m\u00e1y EUV th\u1ebf h\u1ec7 ti\u1ebfp theo (High-NA), chi ph\u00ed c\u00f2n t\u0103ng v\u1ecdt \u2013 d\u1ef1 ki\u1ebfn kho\u1ea3ng <strong>$300\u2013400 tri\u1ec7u m\u1ed7i m\u00e1y<\/strong>\u200b. Ch\u1eb3ng h\u1ea1n, ASML EXE:5000 (High-NA NA=0.55) c\u00f3 gi\u00e1 ni\u00eam y\u1ebft ~$370M\u200b. \u0110\u00e2y th\u1ef1c s\u1ef1 l\u00e0 nh\u1eefng thi\u1ebft b\u1ecb c\u00f4ng nghi\u1ec7p \u0111\u1eaft nh\u1ea5t th\u1ebf gi\u1edbi. Kh\u00f4ng ch\u1ec9 \u0111\u1eaft ti\u1ec1n, vi\u1ec7c <strong>s\u1ea3n xu\u1ea5t<\/strong> ch\u00fang c\u0169ng c\u1ef1c k\u1ef3 gi\u1edbi h\u1ea1n: n\u0103m 2020 ASML xu\u1ea5t x\u01b0\u1edfng 31 m\u00e1y EUV\u200b, n\u0103m 2022 \u0111\u1ea1t 54 m\u00e1y\u200b \u2013 t\u1ee9c m\u1ed7i tu\u1ea7n ch\u1ec9 kho\u1ea3ng m\u1ed9t chi\u1ebfc \u0111\u01b0\u1ee3c ho\u00e0n thi\u1ec7n. To\u00e0n c\u1ea7u hi\u1ec7n ch\u1ec9 c\u00f3 v\u00e0i tr\u0103m m\u00e1y EUV ho\u1ea1t \u0111\u1ed9ng, t\u1eadp trung \u1edf m\u1ed9t s\u1ed1 \u00edt c\u00f4ng ty\/t\u1eadp \u0111o\u00e0n. \u0110i\u1ec1u n\u00e0y t\u1ea1o n\u00ean <strong>th\u1ebf \u0111\u1ed9c t\u00f4n<\/strong> c\u1ee7a ASML; \u0111\u1ed3ng th\u1eddi c\u00e1c quy \u0111\u1ecbnh xu\u1ea5t kh\u1ea9u nghi\u00eam ng\u1eb7t c\u0169ng bi\u1ebfn EUV th\u00e0nh m\u1eb7t h\u00e0ng nh\u1ea1y c\u1ea3m \u0111\u1ecba ch\u00ednh tr\u1ecb (v\u00ed d\u1ee5 ch\u00ednh ph\u1ee7 H\u00e0 Lan v\u00e0 M\u1ef9 c\u1ea5m b\u00e1n EUV cho Trung Qu\u1ed1c\u200b).<\/p>\n\n\n\n<p>M\u00e1y quang kh\u1eafc DUV (193 nm) tuy \u201ckhi\u00eam t\u1ed1n\u201d h\u01a1n EUV nh\u01b0ng v\u1eabn l\u00e0 tr\u1ee5 c\u1ed9t c\u1ee7a nhi\u1ec1u nh\u00e0 m\u00e1y. ASML, Nikon v\u00e0 Canon \u0111\u1ec1u s\u1ea3n xu\u1ea5t m\u00e1y DUV v\u1edbi gi\u00e1 r\u1ebb h\u01a1n (kho\u1ea3ng v\u00e0i ch\u1ee5c tri\u1ec7u USD m\u1ed7i m\u00e1y). ASML chi\u1ebfm ~60% th\u1ecb ph\u1ea7n DUV\u200b, Nikon ~20-30%, c\u00f2n l\u1ea1i Canon. Nh\u1eefng m\u00e1y DUV ArF immersion th\u1ebf h\u1ec7 NXT c\u1ee7a ASML c\u00f3 t\u1ed1c \u0111\u1ed9 c\u00f3 th\u1ec3 &gt;250 wafer\/gi\u1edd, r\u1ea5t th\u00edch h\u1ee3p cho c\u00e1c l\u1edbp \u00edt \u0111\u00f2i h\u1ecfi. Gi\u00e1 m\u1ed9t m\u00e1y ArF immersion kho\u1ea3ng 50\u201370 tri\u1ec7u USD (theo c\u1ea5u h\u00ecnh). Nh\u1edd c\u00f3 nhi\u1ec1u nh\u00e0 cung c\u1ea5p, th\u1ecb tr\u01b0\u1eddng DUV c\u1ea1nh tranh h\u01a1n v\u00e0 c\u00e1c h\u00e3ng Trung Qu\u1ed1c nh\u01b0 SMEE c\u0169ng \u0111ang n\u1ed7 l\u1ef1c ph\u00e1t tri\u1ec3n m\u00e1y DUV n\u1ed9i \u0111\u1ecba. D\u1eabu v\u1eady, \u1edf ng\u01b0\u1ee1ng c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn nh\u1ea5t, <strong>DUV kh\u00f4ng th\u1ec3 thay th\u1ebf EUV<\/strong> do h\u1ea1n ch\u1ebf v\u1eadt l\u00fd, n\u00ean c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t chip bu\u1ed9c ph\u1ea3i \u0111\u1ea7u t\u01b0 EUV d\u00f9 chi ph\u00ed cao.<\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading_98c340-da, .wp-block-kadence-advancedheading.kt-adv-heading_98c340-da[data-kb-block=\"kb-adv-heading_98c340-da\"]{font-style:normal;}.wp-block-kadence-advancedheading.kt-adv-heading_98c340-da mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading_98c340-da[data-kb-block=\"kb-adv-heading_98c340-da\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}<\/style>\n<h5 class=\"kt-adv-heading_98c340-da wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading_98c340-da\"><strong>C\u00e1c \u0111\u1ed1i th\u1ee7 c\u1ea1nh tranh v\u00e0 c\u00f4ng ngh\u1ec7 thay th\u1ebf (X-ray, nanoimprint)<\/strong><\/h5>\n\n\n\n<p>Trong l\u1ecbch s\u1eed, nhi\u1ec1u c\u00f4ng ngh\u1ec7 quang kh\u1eafc <strong>th\u1ebf h\u1ec7 m\u1edbi<\/strong> \u0111\u01b0\u1ee3c nghi\u00ean c\u1ee9u v\u1edbi m\u1ee5c ti\u00eau v\u01b0\u1ee3t qua gi\u1edbi h\u1ea1n c\u1ee7a quang kh\u1eafc quang h\u1ecdc truy\u1ec1n th\u1ed1ng. M\u1ed9t v\u00e0i c\u00e1i t\u00ean n\u1ed5i b\u1eadt g\u1ed3m <strong>quang kh\u1eafc tia X, quang kh\u1eafc ch\u00f9m \u0111i\u1ec7n t\u1eed, quang kh\u1eafc ion h\u1ed9i t\u1ee5<\/strong> v\u00e0 <strong>in nano (nanoimprint)<\/strong>\u200b. Tuy nhi\u00ean, h\u1ea7u h\u1ebft nh\u1eefng c\u00f4ng ngh\u1ec7 n\u00e0y \u0111\u1ec1u ch\u01b0a th\u1ec3 thay th\u1ebf photolithography do c\u00e1c r\u00e0o c\u1ea3n v\u1ec1 k\u1ef9 thu\u1eadt ho\u1eb7c kinh t\u1ebf, v\u00e0 photolithography (hi\u1ec7n th\u00e2n l\u00e0 DUV\/EUV) v\u1eabn ti\u1ebfp t\u1ee5c c\u1ea3i ti\u1ebfn \u0111\u1ec3 duy tr\u00ec v\u1ecb tr\u00ed ch\u1ee7 \u0111\u1ea1o\u200b.<\/p>\n\n\n\n<p><strong>X-ray lithography:<\/strong> T\u1eebng \u0111\u01b0\u1ee3c k\u1ef3 v\u1ecdng trong th\u1eadp ni\u00ean 1980-90 nh\u01b0 \u1ee9ng vi\u00ean cho th\u1eddi \u201ch\u1eadu quang h\u1ecdc\u201d, do tia X c\u00f3 b\u01b0\u1edbc s\u00f3ng r\u1ea5t ng\u1eafn (0,4\u20134 nm) cho \u0111\u1ed9 ph\u00e2n gi\u1ea3i l\u00fd thuy\u1ebft c\u1ef1c cao. Quang kh\u1eafc tia X d\u00f9ng ch\u00f9m tia X m\u1ec1m (th\u01b0\u1eddng ~1 nm) chi\u1ebfu qua mask \u0111\u1eb7c bi\u1ec7t (mask ph\u1ea3i l\u00e0m b\u1eb1ng m\u00e0ng r\u1ea5t m\u1ecfng, hoa v\u0103n b\u1eb1ng v\u00e0ng ho\u1eb7c tungsten) \u0111\u1ec3 in l\u00ean resist d\u00e0y. D\u00f9 tr\u00e1nh \u0111\u01b0\u1ee3c hi\u1ec7n t\u01b0\u1ee3ng nhi\u1ec5u x\u1ea1, k\u1ef9 thu\u1eadt n\u00e0y g\u1eb7p lo\u1ea1t v\u1ea5n \u0111\u1ec1: <strong>ngu\u1ed3n ph\u00e1t tia X<\/strong> \u0111\u1ee7 m\u1ea1nh r\u1ea5t \u0111\u1eaft (ph\u1ea3i d\u00f9ng synchrotron ho\u1eb7c plasma \u0111\u1eb7c bi\u1ec7t), <strong>mask tia X kh\u00f3 ch\u1ebf t\u1ea1o<\/strong> v\u00e0 d\u1ec5 h\u1ecfng (v\u00ec kh\u00f4ng c\u00f3 pellicle, tia X c\u0169ng kh\u00f3 xuy\u00ean qua v\u1eadt li\u1ec7u d\u00e0y), v\u00e0 <strong>resist cho tia X<\/strong> y\u00eau c\u1ea7u \u0111\u1ed9 nh\u1ea1y cao nh\u01b0ng kh\u00f4ng \u0111\u01b0\u1ee3c qu\u00e1 m\u1ecfng. K\u1ebft qu\u1ea3, quang kh\u1eafc tia X m\u00e3i \u1edf giai \u0111o\u1ea1n nghi\u00ean c\u1ee9u, ch\u01b0a t\u1eebng th\u01b0\u01a1ng m\u1ea1i h\u00f3a l\u1edbn. M\u1ed9t s\u1ed1 d\u1ef1 \u00e1n \u0111\u00e3 d\u1eebng l\u1ea1i khi EUV t\u1ecf ra kh\u1ea3 thi h\u01a1n v\u00e0o nh\u1eefng n\u0103m 2000. Hi\u1ec7n nay, X-ray lithography h\u1ea7u nh\u01b0 kh\u00f4ng n\u1eb1m trong l\u1ed9 tr\u00ecnh c\u00f4ng nghi\u1ec7p ch\u00ednh, d\u00f9 v\u1eabn c\u00f3 th\u1ec3 d\u00f9ng trong ph\u00f2ng th\u00ed nghi\u1ec7m \u0111\u1ec3 t\u1ea1o c\u00e1c nanostructure \u0111\u1eb7c th\u00f9.<\/p>\n\n\n\n<p><strong>Nanoimprint lithography (NIL):<\/strong> Kh\u00e1c v\u1edbi c\u00e1c ph\u01b0\u01a1ng ph\u00e1p chi\u1ebfu x\u1ea1, nanoimprint mang t\u00ednh <strong>c\u01a1 h\u1ecdc<\/strong>: m\u1ed9t <strong>khu\u00f4n m\u1eabu (stamp)<\/strong> \u0111\u01b0\u1ee3c in tr\u1ef1c ti\u1ebfp l\u00ean l\u1edbp resist l\u1ecfng \u0111\u1ec3 t\u1ea1o hoa v\u0103n gi\u1ed1ng nh\u01b0 con d\u1ea5u. Canon v\u00e0 Toshiba \u0111\u00e3 ph\u00e1t tri\u1ec3n thi\u1ebft b\u1ecb NIL v\u1edbi l\u1eddi h\u1ee9a h\u1eb9n l\u00e0 gi\u1ea3i ph\u00e1p r\u1ebb h\u01a1n EUV nhi\u1ec1u\u200b. \u01afu \u0111i\u1ec3m NIL l\u00e0 kh\u00f4ng b\u1ecb gi\u1edbi h\u1ea1n nhi\u1ec5u x\u1ea1, c\u00f3 th\u1ec3 t\u1ea1o pattern r\u1ea5t nh\u1ecf (~10 nm ho\u1eb7c nh\u1ecf h\u01a1n) m\u1ed9t c\u00e1ch <strong>\u201cquang h\u1ecdc mi\u1ec5n ph\u00ed\u201d<\/strong> \u2013 t\u1ee9c kh\u00f4ng c\u1ea7n ngu\u1ed3n s\u00e1ng \u0111\u1eaft ti\u1ec1n hay h\u1ec7 th\u1ea5u k\u00ednh. Th\u00eam v\u00e0o \u0111\u00f3, NIL l\u00fd thuy\u1ebft c\u00f3 th\u1ec3 t\u1ea1o pattern nhi\u1ec1u l\u1edbp c\u00f9ng l\u00fac n\u1ebfu khu\u00f4n \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf ph\u00f9 h\u1ee3p, t\u0103ng t\u1ed1c \u0111\u1ed9. <strong>Tuy nhi\u00ean<\/strong>, nh\u01b0\u1ee3c \u0111i\u1ec3m ch\u00ed m\u1ea1ng c\u1ee7a NIL n\u1eb1m \u1edf <strong>kh\u00e2u c\u0103n ch\u1ec9nh v\u00e0 khuy\u1ebft t\u1eadt<\/strong>. Khi ph\u1ea3i in nhi\u1ec1u l\u1edbp ch\u1ed3ng l\u00ean nhau (chip logic c\u00f3 &gt;50 l\u1edbp), vi\u1ec7c \u00e9p khu\u00f4n c\u00f3 th\u1ec3 g\u00e2y l\u1ec7ch, bi\u1ebfn d\u1ea1ng pattern gi\u1eefa c\u00e1c l\u1edbp do co k\u00e9o c\u01a1 h\u1ecdc\u200b. M\u1ed7i l\u1edbp in l\u1eb7p \u0111\u00f2i h\u1ecfi c\u0103n ch\u1ec9nh nano gi\u1eefa khu\u00f4n v\u00e0 wafer, r\u1ea5t kh\u00f3 \u0111\u1ea1t \u0111\u1ed9 ch\u00ednh x\u00e1c nh\u01b0 quang h\u1ecdc (v\u1ed1n d\u00f9ng h\u1ec7 th\u1ed1ng laser align). H\u01a1n n\u1eefa, qu\u00e1 tr\u00ecnh <strong>ti\u1ebfp x\u00fac<\/strong> khu\u00f4n v\u1edbi resist d\u1ec5 l\u00e0m ph\u00e1t sinh h\u1ea1t b\u1ee5i, khuy\u1ebft t\u1eadt, v\u00e0 khu\u00f4n m\u00f2n d\u1ea7n theo th\u1eddi gian. Hi\u1ec7n nay, NIL \u0111ang t\u00ecm ch\u1ed7 \u0111\u1ee9ng trong c\u00e1c l\u0129nh v\u1ef1c <em>photonics, MEMS, biochips<\/em> \u2013 n\u01a1i ch\u1ec9 c\u1ea7n in 1-2 l\u1edbp v\u00e0 kh\u00f4ng \u0111\u00f2i h\u1ecfi overlay ch\u1eb7t\u200b. C\u00f2n trong s\u1ea3n xu\u1ea5t vi m\u1ea1ch nhi\u1ec1u l\u1edbp, NIL ch\u01b0a th\u1ec3 c\u1ea1nh tranh v\u1edbi quang kh\u1eafc EUV v\u1ed1n tuy \u0111\u1eaft nh\u01b0ng \u0111\u1ea3m b\u1ea3o n\u0103ng su\u1ea5t v\u00e0 \u0111\u1ed9 tin c\u1eady cao h\u01a1n\u200b. C\u00e1c chuy\u00ean gia \u0111\u00e1nh gi\u00e1 NIL s\u1ebd l\u00e0 b\u1ed5 tr\u1ee3 cho nh\u1eefng m\u1ea3ng chuy\u00ean bi\u1ec7t, h\u01a1n l\u00e0 thay th\u1ebf ho\u00e0n to\u00e0n quang kh\u1eafc truy\u1ec1n th\u1ed1ng.<\/p>\n\n\n\n<p><strong>C\u00e1c h\u00e3ng thi\u1ebft b\u1ecb kh\u00e1c:<\/strong> Trong m\u1ea3ng quang kh\u1eafc truy\u1ec1n th\u1ed1ng, <em>Nikon<\/em> v\u00e0 <em>Canon<\/em> t\u1eebng l\u00e0 \u0111\u1ed1i th\u1ee7 l\u1edbn c\u1ee7a ASML th\u1eddi k\u1ef3 m\u00e1y DUV. Nikon \u0111\u00e3 cung c\u1ea5p m\u00e1y cho Intel t\u1edbi node 45 nm, nh\u01b0ng r\u1ed3i b\u1ecb ASML v\u01b0\u1ee3t l\u00ean. Hi\u1ec7n Nikon v\u1eabn b\u00e1n m\u00e1y DUV (193 nm) cho m\u1ed9t s\u1ed1 h\u00e3ng b\u1ed9 nh\u1edb v\u00e0 c\u00e1c node k\u00e9m ti\u00ean ti\u1ebfn, c\u00f2n Canon t\u1eadp trung v\u00e0o th\u1ecb tr\u01b0\u1eddng niche (m\u00e1y cho packaging, MEMS). \u1ede m\u1ea3ng EUV, c\u1ea3 Nikon v\u00e0 Canon \u0111\u1ec1u \u0111\u00e3 t\u1eeb b\u1ecf, d\u1eabn \u0111\u1ebfn th\u1ebf <strong>\u0111\u1ed9c quy\u1ec1n c\u1ee7a ASML<\/strong>. V\u1ec1 d\u00e0i h\u1ea1n, c\u1ea3 hai h\u00e3ng Nh\u1eadt B\u1ea3n c\u00f3 th\u1ec3 h\u01b0\u1edbng \u0111\u1ebfn th\u1ebf h\u1ec7 \u201csau EUV\u201d nh\u01b0 NIL (Canon) ho\u1eb7c nghi\u00ean c\u1ee9u c\u00e1c gi\u1ea3i ph\u00e1p e-beam multi-beam. Ngo\u00e0i ra, nh\u1eefng c\u00f4ng ty nh\u01b0 <em>Mapper<\/em> (H\u00e0 Lan) tr\u01b0\u1edbc \u0111\u00e2y t\u1eebng ph\u00e1t tri\u1ec3n m\u00e1y <strong>multi-beam e-beam<\/strong> nh\u1eb1m c\u1ea1nh tranh EUV (\u00fd t\u01b0\u1edfng d\u00f9ng h\u00e0ng ng\u00e0n ch\u00f9m \u0111i\u1ec7n t\u1eed song song \u0111\u1ec3 in nhanh), nh\u01b0ng d\u1ef1 \u00e1n \u0111\u00e3 ph\u00e1 s\u1ea3n v\u00ec ch\u01b0a k\u1ecbp \u0111\u1ea1t hi\u1ec7u qu\u1ea3 mong mu\u1ed1n khi EUV \u0111\u00e3 ra m\u1eaft.<\/p>\n\n\n\n<p>T\u1ed5ng k\u1ebft l\u1ea1i, <strong>ASML v\u1edbi EUV<\/strong> hi\u1ec7n kh\u00f4ng c\u00f3 \u0111\u1ed1i th\u1ee7 ngang t\u1ea7m, nh\u01b0ng ng\u00e0nh b\u00e1n d\u1eabn lu\u00f4n c\u1ea3nh gi\u00e1c v\u00e0 \u0111\u1ea7u t\u01b0 v\u00e0o c\u00e1c <strong>c\u00f4ng ngh\u1ec7 thay th\u1ebf<\/strong> ph\u00f2ng tr\u01b0\u1eddng h\u1ee3p EUV ch\u1ea1m gi\u1edbi h\u1ea1n. X-ray lithography v\u00e0 nanoimprint lithography l\u00e0 hai trong s\u1ed1 c\u00e1c h\u01b0\u1edbng \u0111\u00e3 v\u00e0 \u0111ang \u0111\u01b0\u1ee3c th\u0103m d\u00f2, m\u1ed7i h\u01b0\u1edbng c\u00f3 \u01b0u v\u00e0 nh\u01b0\u1ee3c ri\u00eang. Cho \u0111\u1ebfn khi m\u1ed9t c\u00f4ng ngh\u1ec7 m\u1edbi ch\u1ee9ng minh \u0111\u01b0\u1ee3c t\u00ednh v\u01b0\u1ee3t tr\u1ed9i, quang kh\u1eafc quang h\u1ecdc (DUV\/EUV) v\u1eabn s\u1ebd l\u00e0 l\u1ef1a ch\u1ecdn ch\u1ee7 \u0111\u1ea1o cho s\u1ea3n xu\u1ea5t chip.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Hu\u1ef3nh C\u00f4ng T\u00fa \u1ede th\u1eddi \u0111i\u1ec3m hi\u1ec7n t\u1ea1i, ASML (H\u00e0 Lan) l\u00e0 h\u00e3ng d\u1eabn \u0111\u1ea7u th\u1ecb tr\u01b0\u1eddng thi\u1ebft b\u1ecb quang kh\u1eafc, \u0111\u1eb7c bi\u1ec7t trong m\u1ea3ng EUV. C\u00e1c h\u1ec7 th\u1ed1ng m\u00e1y quang kh\u1eafc hi\u1ec7n \u0111\u1ea1i l\u00e0 nh\u1eefng c\u1ed7 m\u00e1y tinh vi b\u1eadc nh\u1ea5t m\u00e0 con ng\u01b0\u1eddi ch\u1ebf t\u1ea1o, v\u1edbi gi\u00e1 th\u00e0nh v\u00e0 quy m\u00f4 kh\u1ed5ng l\u1ed3&#8230;.<\/p>\n","protected":false},"author":1,"featured_media":4262,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[3],"tags":[],"class_list":["post-4273","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghe"],"_links":{"self":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts\/4273","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=4273"}],"version-history":[{"count":1,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts\/4273\/revisions"}],"predecessor-version":[{"id":4274,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts\/4273\/revisions\/4274"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/media\/4262"}],"wp:attachment":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=4273"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=4273"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=4273"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}