{"id":4264,"date":"2025-02-27T10:32:38","date_gmt":"2025-02-27T03:32:38","guid":{"rendered":"https:\/\/labantrithuc.com\/?p=4264"},"modified":"2025-02-27T10:35:55","modified_gmt":"2025-02-27T03:35:55","slug":"cong-nghe-quang-khac-trong-san-xuat-vi-mach-ban-dan-ky-2","status":"publish","type":"post","link":"https:\/\/labantrithuc.com\/?p=4264","title":{"rendered":"C\u00e1c c\u00f4ng ngh\u1ec7 quang kh\u1eafc hi\u1ec7n \u0111\u1ea1i (K\u1ef3 2)"},"content":{"rendered":"<style>.wp-block-kadence-advancedheading.kt-adv-heading_cf4abb-90, .wp-block-kadence-advancedheading.kt-adv-heading_cf4abb-90[data-kb-block=\"kb-adv-heading_cf4abb-90\"]{font-style:normal;}.wp-block-kadence-advancedheading.kt-adv-heading_cf4abb-90 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading_cf4abb-90[data-kb-block=\"kb-adv-heading_cf4abb-90\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}<\/style>\n<h2 class=\"kt-adv-heading_cf4abb-90 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading_cf4abb-90\"><strong>2. C\u00e1c c\u00f4ng ngh\u1ec7 quang kh\u1eafc hi\u1ec7n \u0111\u1ea1i<\/strong><\/h2>\n\n\n\n<p>Trong th\u1eadp k\u1ef7 v\u1eeba qua, <strong>c\u00f4ng ngh\u1ec7 quang kh\u1eafc<\/strong> \u0111\u00e3 c\u00f3 nh\u1eefng b\u01b0\u1edbc nh\u1ea3y v\u1ecdt nh\u1eb1m \u0111\u00e1p \u1ee9ng y\u00eau c\u1ea7u thu nh\u1ecf k\u00edch th\u01b0\u1edbc xu\u1ed1ng m\u1ee9c nanomet. Hai c\u00f4ng ngh\u1ec7 quang kh\u1eafc \u00e1nh s\u00e1ng ch\u1ee7 \u0111\u1ea1o hi\u1ec7n nay l\u00e0 <strong>DUV (Deep Ultraviolet)<\/strong> v\u00e0 <strong>EUV (Extreme Ultraviolet)<\/strong>, t\u01b0\u01a1ng \u1ee9ng v\u1edbi b\u01b0\u1edbc s\u00f3ng \u00e1nh s\u00e1ng ~193 nm v\u00e0 13.5 nm. M\u1ed7i c\u00f4ng ngh\u1ec7 c\u00f3 \u0111\u1eb7c \u0111i\u1ec3m k\u1ef9 thu\u1eadt v\u00e0 gi\u1edbi h\u1ea1n ri\u00eang, \u0111\u1ed3ng th\u1eddi c\u00e1c k\u1ef9 thu\u1eadt h\u1ed7 tr\u1ee3 nh\u01b0 <strong>multiple patterning<\/strong> (in nhi\u1ec1u l\u1ea7n) v\u00e0 c\u0103n ch\u1ec9nh mask si\u00eau ch\u00ednh x\u00e1c \u0111\u00e3 \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 v\u01b0\u1ee3t qua c\u00e1c th\u00e1ch th\u1ee9c v\u1ec1 \u0111\u1ed9 ph\u00e2n gi\u1ea3i.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1020\" height=\"612\" src=\"https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image.png\" alt=\"\" class=\"wp-image-4261\" srcset=\"https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image.png 1020w, https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image-300x180.png 300w, https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image-768x461.png 768w\" sizes=\"auto, (max-width: 1020px) 100vw, 1020px\" \/><\/figure>\n\n\n\n<p><strong>So s\u00e1nh DUV v\u00e0 EUV: B\u01b0\u1edbc s\u00f3ng, \u0111\u1ed9 ph\u00e2n gi\u1ea3i v\u00e0 gi\u1edbi h\u1ea1n k\u1ef9 thu\u1eadt<\/strong><\/p>\n\n\n\n<p><strong>DUV (Deep UV)<\/strong> hi\u1ec7n \u0111\u01b0\u1ee3c hi\u1ec3u l\u00e0 k\u1ef9 thu\u1eadt quang kh\u1eafc s\u1eed d\u1ee5ng b\u1ee9c x\u1ea1 t\u1eed ngo\u1ea1i s\u00e2u, \u0111i\u1ec3n h\u00ecnh l\u00e0 <strong>laser ArF 193 nm<\/strong>. T\u1eeb node ~65 nm tr\u1edf \u0111i, c\u00e1c m\u00e1y quang kh\u1eafc DUV \u0111\u00e3 chuy\u1ec3n sang d\u00f9ng <strong>b\u1ec3 dung d\u1ecbch (immersion)<\/strong> gi\u1eefa th\u1ea5u k\u00ednh v\u00e0 wafer \u0111\u1ec3 t\u0103ng chi\u1ebft su\u1ea5t m\u00f4i tr\u01b0\u1eddng, gi\u00fap t\u0103ng \u0111\u1ed9 ph\u00e2n gi\u1ea3i (NA hi\u1ec7u d\u1ee5ng ~1.35 so v\u1edbi ~0.93 c\u1ee7a kh\u00f4ng kh\u00ed)\u200b. DUV 193 nm (ArF <strong>immersion lithography<\/strong>) \u0111\u00e3 ph\u1ee5c v\u1ee5 ch\u1ebf t\u1ea1o h\u00e0ng lo\u1ea1t \u1edf c\u00e1c th\u1ebf h\u1ec7 45 nm, 32 nm, 22 nm, 14 nm,&#8230; Tuy nhi\u00ean, <strong>\u0111\u1ed9 ph\u00e2n gi\u1ea3i quang h\u1ecdc<\/strong> c\u1ee7a h\u1ec7 DUV \u0111\u00e3 g\u1ea7n \u0111\u1ea1t gi\u1edbi h\u1ea1n: ngay c\u1ea3 v\u1edbi k\u1ef9 thu\u1eadt c\u1ea3i ti\u1ebfn (nh\u01b0 \u0111i\u1ec1u ch\u1ec9nh quang h\u1ecdc OPC, m\u1eb7t n\u1ea1 d\u1ecbch pha, v.v.), m\u1ed9t l\u1ea7n ph\u01a1i c\u1ee7a 193 nm kh\u00f3 t\u1ea1o \u0111\u01b0\u1ee3c pitch nh\u1ecf h\u01a1n ~80 nm. \u0110\u1ec3 in \u0111\u01b0\u1ee3c c\u00e1c m\u1eabu &lt;40 nm, ng\u01b0\u1eddi ta bu\u1ed9c ph\u1ea3i d\u00f9ng <strong>nhi\u1ec1u l\u1ea7n ph\u01a1i v\u00e0 kh\u1eafc ch\u1ed3ng<\/strong> (multiple patterning) \u2013 t\u1ee9c chia nh\u1ecf hoa v\u0103n ra nhi\u1ec1u mask v\u00e0 quy tr\u00ecnh l\u1eb7p l\u1ea1i nhi\u1ec1u b\u01b0\u1edbc (s\u1ebd n\u00f3i r\u00f5 h\u01a1n b\u00ean d\u01b0\u1edbi). \u0110i\u1ec1u n\u00e0y l\u00e0m quy tr\u00ecnh DUV tr\u1edf n\u00ean r\u1ea5t ph\u1ee9c t\u1ea1p v\u00e0 t\u1ed1n k\u00e9m \u1edf c\u00e1c node ti\u00ean ti\u1ebfn (10 nm\/7 nm tr\u1edf xu\u1ed1ng).<\/p>\n\n\n\n<p><strong>EUV (Extreme UV)<\/strong> s\u1eed d\u1ee5ng b\u1ee9c x\u1ea1 t\u1eed ngo\u1ea1i c\u1ef1c ng\u1eafn 13.5 nm, m\u1edf ra kh\u1ea3 n\u0103ng in tr\u1ef1c ti\u1ebfp c\u00e1c chi ti\u1ebft c\u1ef1c nh\u1ecf ch\u1ec9 ~10-20 nm. V\u1ec1 nguy\u00ean l\u00fd, b\u01b0\u1edbc s\u00f3ng EUV ng\u1eafn h\u01a1n ~14 l\u1ea7n so v\u1edbi 193 nm, ngh\u0129a l\u00e0 c\u00f3 ti\u1ec1m n\u0103ng \u0111\u1ea1t \u0111\u1ed9 ph\u00e2n gi\u1ea3i cao h\u01a1n nhi\u1ec1u (theo c\u00f4ng th\u1ee9c Rayleigh, k\u00edch th\u01b0\u1edbc t\u1ed1i thi\u1ec3u t\u1ec9 l\u1ec7 v\u1edbi \u03bb\/NA). Th\u1eadt v\u1eady, v\u1edbi EUV, ng\u01b0\u1eddi ta c\u00f3 th\u1ec3 in m\u1ed9t l\u1edbp pattern 7 nm ch\u1ec9 b\u1eb1ng <strong>m\u1ed9t l\u1ea7n ph\u01a1i duy nh\u1ea5t<\/strong>, trong khi n\u1ebfu d\u00f9ng 193 nm ph\u1ea3i ph\u01a1i v\u00e0 kh\u1eafc l\u1eb7p \u0111\u1ebfn <strong>ba l\u1ea7n<\/strong> m\u1edbi \u0111\u1ea1t \u0111\u01b0\u1ee3c m\u1eadt \u0111\u1ed9 t\u01b0\u01a1ng \u0111\u01b0\u01a1ng\u200b. Do \u0111\u00f3 EUV h\u1ee9a h\u1eb9n \u0111\u01a1n gi\u1ea3n h\u00f3a quy tr\u00ecnh v\u00e0 gi\u1ea3m s\u1ed1 b\u01b0\u1edbc cho c\u00e1c l\u1edbp tinh vi nh\u1ea5t. B\u00ean c\u1ea1nh \u01b0u th\u1ebf v\u1ec1 b\u01b0\u1edbc s\u00f3ng, EUV c\u00f2n s\u1eed d\u1ee5ng <strong>h\u1ec7 g\u01b0\u01a1ng ph\u1ea3n x\u1ea1 nhi\u1ec1u l\u1edbp<\/strong> thay cho th\u1ea5u k\u00ednh, v\u1eadn h\u00e0nh trong m\u00f4i tr\u01b0\u1eddng <strong>ch\u00e2n kh\u00f4ng<\/strong> (\u0111\u1ec3 tr\u00e1nh h\u1ea5p th\u1ee5 tia EUV). H\u1ec7 th\u1ed1ng quang EUV c\u00f3 \u0111\u1ed9 m\u1edf NA ~0.33 (hi\u1ec7n t\u1ea1i) \u2013 th\u1ea5p h\u01a1n NA c\u1ee7a DUV immersion, nh\u01b0ng nh\u1edd b\u01b0\u1edbc s\u00f3ng c\u1ef1c ng\u1eafn, n\u00f3 v\u1eabn \u0111\u1ea1t \u0111\u1ed9 ph\u00e2n gi\u1ea3i v\u01b0\u1ee3t tr\u1ed9i. Th\u1ebf h\u1ec7 m\u00e1y EUV hi\u1ec7n t\u1ea1i (NXE:3400 series) c\u00f3 \u0111\u1ed9 ph\u00e2n gi\u1ea3i hi\u1ec7u d\u1ee5ng kho\u1ea3ng 13 nm\u200b, \u0111\u1ee7 cho c\u00e1c node 7 nm, 5 nm v\u00e0 3 nm. D\u1ef1 ki\u1ebfn trong t\u01b0\u01a1ng lai g\u1ea7n, EUV s\u1ebd \u0111\u01b0\u1ee3c n\u00e2ng c\u1ea5p <strong>High-NA (~0.55)<\/strong> \u0111\u1ec3 ti\u1ebfp t\u1ee5c t\u0103ng \u0111\u1ed9 ph\u00e2n gi\u1ea3i cho c\u00e1c node 2 nm, 1 nm.<\/p>\n\n\n\n<p>Tuy nhi\u00ean, EUV c\u0169ng \u0111\u1ed1i m\u1eb7t v\u1edbi <strong>gi\u1edbi h\u1ea1n k\u1ef9 thu\u1eadt<\/strong> ri\u00eang. Do b\u01b0\u1edbc s\u00f3ng qu\u00e1 ng\u1eafn (13.5 nm t\u01b0\u01a1ng \u1ee9ng n\u0103ng l\u01b0\u1ee3ng photon ~92 eV, cao g\u1ea5p ~14 l\u1ea7n photon 193 nm\u200b), qu\u00e1 tr\u00ecnh quang h\u00f3a c\u1ee7a EUV ph\u1ee9c t\u1ea1p h\u01a1n: sinh ra nhi\u1ec1u <strong>electron th\u1ee9 c\u1ea5p<\/strong>, g\u00e2y hi\u1ec7u \u1ee9ng <strong>ng\u1eabu nhi\u00ean (stochastic)<\/strong> l\u00e0m m\u1edd v\u00e0 nhi\u1ec5u pattern \u1edf m\u1ee9c k\u00edch th\u01b0\u1edbc v\u00e0i nm\u200b. V\u1eadt li\u1ec7u c\u1ea3n quang cho EUV c\u0169ng ph\u1ea3i r\u1ea5t m\u1ecfng (~20 nm) v\u00e0 nh\u1ea1y, d\u1eabn \u0111\u1ebfn hi\u1ec7n t\u01b0\u1ee3ng <strong>nhi\u1ec5u x\u1ea1 Fresnel<\/strong> v\u00e0 gi\u1ea3m \u0111\u1ed9 s\u00e2u ti\u00eau c\u1ef1. Th\u00eam n\u1eefa, kh\u00e1c v\u1edbi DUV d\u00f9ng mask truy\u1ec1n qua, EUV d\u00f9ng <strong>mask ph\u1ea3n x\u1ea1<\/strong> \u0111\u1eb7c bi\u1ec7t (g\u1ed3m 40 l\u1edbp g\u01b0\u01a1ng molybdenum-silicon). Mask EUV kh\u00f4ng th\u1ec3 ph\u1ee7 k\u00ednh pellicle d\u00e0y (v\u00ec h\u1ea5p th\u1ee5 tia EUV), khi\u1ebfn n\u00f3 d\u1ec5 b\u1ecb b\u1ee5i b\u1ea9n \u2013 ch\u1ec9 m\u1ed9t h\u1ea1t b\u1ee5i nh\u1ecf c\u0169ng c\u00f3 th\u1ec3 ch\u1eb7n tia v\u00e0 in b\u00f3ng l\u00ean wafer\u200b. Hi\u1ec7n c\u00e1c t\u1ea5m pellicle si\u00eau m\u1ecfng cho EUV (\u0111\u1ed9 truy\u1ec1n ~83-85%) \u0111ang \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 b\u1ea3o v\u1ec7 mask\u200b. V\u1ec1 ngu\u1ed3n s\u00e1ng, m\u00e1y EUV d\u00f9ng plasma thi\u1ebfc (Sn) \u0111\u01b0\u1ee3c k\u00edch th\u00edch b\u1edfi laser CO2, \u0111\u1ea1t c\u00f4ng su\u1ea5t ~250 W (t\u1ea1i \u0111i\u1ec3m h\u1ed9i t\u1ee5) \u1edf c\u00e1c m\u00e1y th\u1ebf h\u1ec7 m\u1edbi, cho ph\u00e9p x\u1eed l\u00fd 170 wafer\/gi\u1edd\u200b\u2013 th\u1ea5p h\u01a1n so v\u1edbi m\u00e1y DUV (&gt;250 wafer\/gi\u1edd), \u0111\u1ed3ng ngh\u0129a n\u0103ng su\u1ea5t fab gi\u1ea3m. Ngo\u00e0i ra, m\u00e1y EUV ti\u00eau th\u1ee5 \u0111i\u1ec7n n\u0103ng kh\u1ed5ng l\u1ed3 (&gt;1 MW m\u1ed7i m\u00e1y) do hi\u1ec7u su\u1ea5t ph\u00e1t tia r\u1ea5t th\u1ea5p (~0,02%) so v\u1edbi DUV (~0,1%)\u200b.<\/p>\n\n\n\n<p>T\u00f3m l\u1ea1i, <strong>DUV 193 nm<\/strong> hi\u1ec7n v\u1eabn \u0111\u01b0\u1ee3c d\u00f9ng ph\u1ed5 bi\u1ebfn cho nhi\u1ec1u l\u1edbp m\u1ea1ch l\u1edbn v\u00ec t\u1ed1c \u0111\u1ed9 cao v\u00e0 m\u00e1y m\u00f3c s\u1eb5n c\u00f3, nh\u01b0ng khi c\u1ea7n c\u1ea5u tr\u00fac nh\u1ecf nh\u1ea5t (l\u1edbp poly, kim lo\u1ea1i m\u1ee9c d\u01b0\u1edbi), c\u00e1c h\u00e3ng \u0111\u00e3 b\u1eaft \u0111\u1ea7u chuy\u1ec3n sang <strong>EUV 13.5 nm<\/strong> \u0111\u1ec3 tr\u00e1nh l\u1ea1m d\u1ee5ng k\u1ef9 thu\u1eadt nhi\u1ec1u l\u1ea7n in ch\u1ed3ng. EUV c\u00f3 l\u1ee3i th\u1ebf \u0111\u01a1n gi\u1ea3n h\u00f3a b\u01b0\u1edbc in c\u00e1c node ti\u00ean ti\u1ebfn \u2013 v\u00ed d\u1ee5 \u1edf 7 nm, thay v\u00ec <strong>ph\u01a1i 3 l\u1ea7n v\u1edbi DUV<\/strong> (LELELE &#8211; triple patterning), ch\u1ec9 c\u1ea7n <strong>1 l\u1ea7n ph\u01a1i v\u1edbi EUV<\/strong> cho c\u00f9ng m\u1ed9t m\u1eadt \u0111\u1ed9\u200b. Nh\u01b0ng EUV c\u0169ng \u0111\u1eb7t ra th\u00e1ch th\u1ee9c v\u1ec1 v\u1eadt li\u1ec7u, thi\u1ebft b\u1ecb v\u00e0 th\u00f4ng s\u1ed1 v\u1eadn h\u00e0nh kh\u00e1c so v\u1edbi DUV. Hi\u1ec7n t\u1ea1i, c\u1ea3 hai c\u00f4ng ngh\u1ec7 <strong>ArF immersion DUV<\/strong> v\u00e0 <strong>EUV<\/strong> th\u01b0\u1eddng \u0111\u01b0\u1ee3c k\u1ebft h\u1ee3p trong s\u1ea3n xu\u1ea5t: EUV d\u00f9ng cho c\u00e1c l\u1edbp c\u1ea7n \u0111\u1ed9 ph\u00e2n gi\u1ea3i cao nh\u1ea5t, c\u00f2n DUV v\u1eabn d\u00f9ng cho c\u00e1c l\u1edbp \u00edt \u0111\u00f2i h\u1ecfi h\u01a1n, nh\u1eb1m t\u1ed1i \u01b0u chi ph\u00ed.<\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading_642d2a-76, .wp-block-kadence-advancedheading.kt-adv-heading_642d2a-76[data-kb-block=\"kb-adv-heading_642d2a-76\"]{font-style:normal;}.wp-block-kadence-advancedheading.kt-adv-heading_642d2a-76 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading_642d2a-76[data-kb-block=\"kb-adv-heading_642d2a-76\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}<\/style>\n<h2 class=\"kt-adv-heading_642d2a-76 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading_642d2a-76\"><strong>K\u1ef9 thu\u1eadt Multiple Patterning v\u00e0 c\u0103n ch\u1ec9nh mask (overlay)<\/strong><\/h2>\n\n\n\n<p>Khi \u0111\u1ed9 ph\u00e2n gi\u1ea3i c\u1ee7a m\u1ed9t l\u1ea7n quang kh\u1eafc \u0111\u01a1n l\u1ebb ch\u1ea1m gi\u1edbi h\u1ea1n, ng\u00e0nh b\u00e1n d\u1eabn \u0111\u00e3 s\u00e1ng t\u1ea1o ra ph\u01b0\u01a1ng ph\u00e1p <strong>multiple patterning<\/strong> \u2013 t\u1ee9c s\u1eed d\u1ee5ng nhi\u1ec1u l\u1ea7n quang kh\u1eafc n\u1ed1i ti\u1ebfp \u0111\u1ec3 t\u1ea1o ra m\u1eadt \u0111\u1ed9 pattern cao h\u01a1n kh\u1ea3 n\u0103ng quang h\u1ecdc ban \u0111\u1ea7u. \u00dd t\u01b0\u1edfng chung l\u00e0: thay v\u00ec in to\u00e0n b\u1ed9 hoa v\u0103n d\u00e0y \u0111\u1eb7c trong <strong>m\u1ed9t mask<\/strong>, ta <strong>chia nh\u1ecf m\u1eabu<\/strong> \u0111\u00f3 ra <strong>nhi\u1ec1u mask<\/strong> kh\u00e1c nhau, m\u1ed7i mask ch\u1ee9a m\u1ed9t ph\u1ea7n hoa v\u0103n v\u1edbi m\u1eadt \u0111\u1ed9 th\u01b0a h\u01a1n (d\u1ec5 in h\u01a1n)\u200b. Sau \u0111\u00f3 ti\u1ebfn h\u00e0nh ph\u01a1i v\u00e0 kh\u1eafc tu\u1ea7n t\u1ef1 t\u1eebng mask m\u1ed9t, sao cho c\u00e1c pattern b\u1ed5 sung l\u1eabn nhau v\u00e0 ch\u1ed3ng kh\u1edbp \u0111\u1ec3 t\u1ea1o ra t\u1ed5ng th\u1ec3 hoa v\u0103n ban \u0111\u1ea7u tr\u00ean wafer\u200b. B\u1eb1ng c\u00e1ch n\u00e0y, hai l\u1ea7n ph\u01a1i c\u00f3 th\u1ec3 t\u0103ng g\u1ea5p \u0111\u00f4i m\u1eadt \u0111\u1ed9 \u0111\u01b0\u1eddng m\u1ea1ch (double patterning), th\u1eadm ch\u00ed ba l\u1ea7n (triple patterning) t\u0103ng g\u1ea5p ba. K\u1ef9 thu\u1eadt multiple patterning b\u1eaft \u0111\u1ea7u \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng t\u1eeb node ~20 nm khi m\u1ed9t l\u1ea7n ph\u01a1i 193 nm kh\u00f4ng \u0111\u1ee7 in c\u00e1c chi ti\u1ebft ~40 nm\u200b. V\u00ed d\u1ee5, \u1edf node 14 nm\/10 nm (s\u1eed d\u1ee5ng quang kh\u1eafc ArF 193 nm), h\u1ea7u h\u1ebft c\u00e1c l\u1edbp kim lo\u1ea1i v\u00e0 ti\u1ebfp x\u00fac \u0111\u1ec1u ph\u1ea3i in b\u1eb1ng <strong>double patterning<\/strong> ho\u1eb7c <strong>self-aligned quadruple patterning (SAQP)<\/strong> \u0111\u1ec3 \u0111\u1ea1t k\u00edch th\u01b0\u1edbc mong mu\u1ed1n.<\/p>\n\n\n\n<p>C\u00f3 nhi\u1ec1u bi\u1ebfn th\u1ec3 multiple patterning, nh\u01b0 <strong>LELE (Litho-Etch-Litho-Etch)<\/strong> l\u1eb7p 2 l\u1ea7n ho\u1eb7c 3 l\u1ea7n, hay <strong>Spacer patterning (t\u1ea1o v\u00e1ch ng\u0103n t\u1ef1 c\u0103n ch\u1ec9nh)<\/strong>. D\u00f9 ph\u01b0\u01a1ng ph\u00e1p n\u00e0o, m\u1ed9t th\u00e1ch th\u1ee9c k\u1ef9 thu\u1eadt l\u1edbn l\u00e0 <strong>c\u0103n ch\u1ec9nh (mask alignment\/overlay)<\/strong> gi\u1eefa c\u00e1c l\u1ea7n in. M\u1ed7i l\u1ea7n ph\u01a1i sau ph\u1ea3i kh\u1edbp ch\u00ednh x\u00e1c v\u1edbi pattern c\u1ee7a l\u1ea7n tr\u01b0\u1edbc tr\u00ean wafer. Sai s\u1ed1 ch\u1ed3ng l\u1edbp ch\u1ec9 kho\u1ea3ng v\u00e0i ph\u1ea7n tr\u0103m so v\u1edbi k\u00edch th\u01b0\u1edbc pattern \u2013 v\u00ed d\u1ee5 \u1edf 7 nm, overlay tolerance c\u1ee1 &lt;\u00b13 nm. \u0110\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111i\u1ec1u n\u00e0y, c\u00e1c m\u00e1y scanner th\u1ebf h\u1ec7 m\u1edbi c\u00f3 h\u1ec7 c\u0103n ch\u1ec9nh quang h\u1ecdc v\u00e0 hi\u1ec7u ch\u1ec9nh nhi\u1ec5u r\u1ea5t ti\u00ean ti\u1ebfn. Tuy nhi\u00ean, c\u00e0ng nhi\u1ec1u l\u1edbp in ch\u1ed3ng th\u00ec r\u1ee7i ro l\u1ec7ch c\u00e0ng cao v\u00e0 t\u00edch l\u0169y. K\u1ef9 thu\u1eadt <strong>t\u1ef1 c\u0103n ch\u1ec9nh (self-aligned)<\/strong> ra \u0111\u1eddi nh\u1eb1m gi\u1ea3m ph\u1ee5 thu\u1ed9c v\u00e0o align quang h\u1ecdc: v\u00ed d\u1ee5 <strong>SAQP<\/strong> d\u00f9ng m\u1ed9t l\u1ea7n in t\u1ea1o khung, sau \u0111\u00f3 l\u1eafng \u0111\u1ecdng v\u00e0 \u0103n m\u00f2n nhi\u1ec1u b\u01b0\u1edbc \u0111\u1ec3 nh\u00e2n \u0111\u00f4i \u0111\u01b0\u1eddng m\u00e0 kh\u00f4ng c\u1ea7n align nhi\u1ec1u mask. M\u1eb7c d\u00f9 v\u1eady, multiple patterning v\u1eabn l\u00e0m quy tr\u00ecnh k\u00e9o d\u00e0i v\u00e0 t\u0103ng chi ph\u00ed (m\u1ed7i l\u1ea7n in th\u00eam l\u00e0 th\u00eam b\u01b0\u1edbc ph\u1ee7, kh\u1eafc, r\u1eeda&#8230;). \u1ede 7 nm, vi\u1ec7c ph\u1ea3i d\u00f9ng t\u1edbi <strong>3 mask<\/strong> cho m\u1ed9t l\u1edbp kim lo\u1ea1i quan tr\u1ecdng khi\u1ebfn chi ph\u00ed v\u00e0 \u0111\u1ed9 ph\u1ee9c t\u1ea1p t\u0103ng v\u1ecdt\u200b. Ch\u00ednh v\u00ec th\u1ebf, s\u1ef1 ra \u0111\u1eddi c\u1ee7a EUV \u0111\u01b0\u1ee3c mong \u0111\u1ee3i \u0111\u1ec3 <strong>gi\u1ea3m b\u1edbt nhu c\u1ea7u multiple patterning<\/strong>. Th\u1ef1c t\u1ebf t\u1ea1i 7 nm, TSMC v\u00e0 Samsung \u0111\u00e3 chuy\u1ec3n m\u1ed9t s\u1ed1 l\u1edbp sang EUV \u0111\u1ec3 tr\u00e1nh double\/triple patterning b\u1eb1ng DUV. T\u1eeb 5 nm tr\u1edf \u0111i, EUV tr\u1edf th\u00e0nh b\u01b0\u1edbc ch\u1ee7 \u0111\u1ea1o cho c\u00e1c l\u1edbp critical, c\u1eaft gi\u1ea3m \u0111\u00e1ng k\u1ec3 s\u1ed1 l\u01b0\u1ee3ng mask v\u00e0 c\u00f4ng \u0111o\u1ea1n so v\u1edbi tr\u01b0\u1edbc \u0111\u00e2y\u200b.<\/p>\n\n\n\n<p>T\u00f3m l\u1ea1i, <strong>multiple patterning<\/strong> l\u00e0 gi\u1ea3i ph\u00e1p t\u00ecnh th\u1ebf gi\u00fap k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd c\u1ee7a quang kh\u1eafc 193 nm v\u01b0\u1ee3t gi\u1edbi h\u1ea1n t\u1ef1 nhi\u00ean c\u1ee7a n\u00f3, cho ph\u00e9p \u0111\u1ea1t \u0111\u1ebfn node 10 nm\/7 nm b\u1eb1ng thi\u1ebft b\u1ecb hi\u1ec7n c\u00f3. Tuy nhi\u00ean, nh\u01b0\u1ee3c \u0111i\u1ec3m l\u00e0 quy tr\u00ecnh ph\u1ee9c t\u1ea1p, nhi\u1ec1u b\u01b0\u1edbc l\u1eb7p, \u0111\u00f2i h\u1ecfi c\u0103n ch\u1ec9nh si\u00eau ch\u00ednh x\u00e1c, d\u1eabn \u0111\u1ebfn chi ph\u00ed s\u1ea3n xu\u1ea5t t\u0103ng cao. <strong>EUV<\/strong> xu\u1ea5t hi\u1ec7n \u0111\u00e3 gi\u1ea3i quy\u1ebft ph\u1ea7n n\u00e0o b\u00e0i to\u00e1n n\u00e0y: m\u1ed9t l\u1edbp EUV c\u00f3 th\u1ec3 thay th\u1ebf cho 2-3 l\u1edbp DUV tr\u01b0\u1edbc kia\u200b. D\u00f9 v\u1eady, \u1edf c\u00e1c node r\u1ea5t nh\u1ecf (v\u00ed d\u1ee5 3 nm, 2 nm), <strong>multiple patterning c\u00f3 th\u1ec3 quay l\u1ea1i<\/strong> ngay c\u1ea3 v\u1edbi EUV, d\u01b0\u1edbi d\u1ea1ng EUV double patterning, n\u1ebfu m\u1ed9t l\u1ea7n ph\u01a1i EUV kh\u00f4ng \u0111\u1ee7 \u0111\u1ea1t y\u00eau c\u1ea7u. Khi \u0111\u00f3, ng\u00e0nh c\u00f4ng nghi\u1ec7p c\u00f3 th\u1ec3 ph\u1ea3i k\u1ebft h\u1ee3p c\u1ea3 hai: EUV + multiple patterning \u2013 m\u1ed9t vi\u1ec5n c\u1ea3nh t\u1ed1n k\u00e9m m\u00e0 c\u00e1c h\u00e3ng \u0111ang c\u1ed1 tr\u00ec ho\u00e3n b\u1eb1ng c\u00e1ch n\u00e2ng c\u1ea5p c\u00f4ng ngh\u1ec7 (nh\u01b0 ph\u00e1t tri\u1ec3n EUV ngu\u1ed3n m\u1ea1nh h\u01a1n, NA cao h\u01a1n).<\/p>\n","protected":false},"excerpt":{"rendered":"<p>2. C\u00e1c c\u00f4ng ngh\u1ec7 quang kh\u1eafc hi\u1ec7n \u0111\u1ea1i Trong th\u1eadp k\u1ef7 v\u1eeba qua, c\u00f4ng ngh\u1ec7 quang kh\u1eafc \u0111\u00e3 c\u00f3 nh\u1eefng b\u01b0\u1edbc nh\u1ea3y v\u1ecdt nh\u1eb1m \u0111\u00e1p \u1ee9ng y\u00eau c\u1ea7u thu nh\u1ecf k\u00edch th\u01b0\u1edbc xu\u1ed1ng m\u1ee9c nanomet. Hai c\u00f4ng ngh\u1ec7 quang kh\u1eafc \u00e1nh s\u00e1ng ch\u1ee7 \u0111\u1ea1o hi\u1ec7n nay l\u00e0 DUV (Deep Ultraviolet) v\u00e0 EUV (Extreme Ultraviolet), t\u01b0\u01a1ng&#8230;<\/p>\n","protected":false},"author":1,"featured_media":4262,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[3],"tags":[],"class_list":["post-4264","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghe"],"_links":{"self":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts\/4264","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=4264"}],"version-history":[{"count":2,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts\/4264\/revisions"}],"predecessor-version":[{"id":4266,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts\/4264\/revisions\/4266"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/media\/4262"}],"wp:attachment":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=4264"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=4264"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=4264"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}