{"id":4260,"date":"2025-02-26T22:35:28","date_gmt":"2025-02-26T15:35:28","guid":{"rendered":"https:\/\/labantrithuc.com\/?p=4260"},"modified":"2025-02-27T10:36:52","modified_gmt":"2025-02-27T03:36:52","slug":"cong-nghe-quang-khac-trong-san-xuat-vi-mach-ban-dan-ky-1","status":"publish","type":"post","link":"https:\/\/labantrithuc.com\/?p=4260","title":{"rendered":"Nguy\u00ean l\u00fd c\u01a1 b\u1ea3n c\u1ee7a quang kh\u1eafc (K\u1ef3 1)"},"content":{"rendered":"<style>.wp-block-kadence-advancedheading.kt-adv-heading_c1b4f3-c8, .wp-block-kadence-advancedheading.kt-adv-heading_c1b4f3-c8[data-kb-block=\"kb-adv-heading_c1b4f3-c8\"]{font-style:normal;}.wp-block-kadence-advancedheading.kt-adv-heading_c1b4f3-c8 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading_c1b4f3-c8[data-kb-block=\"kb-adv-heading_c1b4f3-c8\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}<\/style>\n<h2 class=\"kt-adv-heading_c1b4f3-c8 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading_c1b4f3-c8\"><strong>1. Nguy\u00ean l\u00fd c\u01a1 b\u1ea3n c\u1ee7a quang kh\u1eafc<\/strong><\/h2>\n\n\n\n<p><strong>Quang kh\u1eafc (photolithography)<\/strong> l\u00e0 quy tr\u00ecnh s\u1eed d\u1ee5ng \u00e1nh s\u00e1ng \u0111\u1ec3 t\u1ea1o c\u00e1c hoa v\u0103n vi m\u00f4 tr\u00ean b\u1ec1 m\u1eb7t wafer b\u00e1n d\u1eabn th\u00f4ng qua m\u1ed9t l\u1edbp v\u1eadt li\u1ec7u nh\u1ea1y s\u00e1ng g\u1ecdi l\u00e0 ch\u1ea5t c\u1ea3n quang. V\u1ec1 c\u01a1 b\u1ea3n, quang kh\u1eafc gi\u1ed1ng nh\u01b0 k\u1ef9 thu\u1eadt ch\u1ee5p \u1ea3nh: chi\u1ebfu m\u1eabu thi\u1ebft k\u1ebf t\u1eeb <strong>mask quang<\/strong> (m\u1eb7t n\u1ea1 quang h\u1ecdc) l\u00ean <strong>wafer<\/strong> \u0111\u01b0\u1ee3c ph\u1ee7 ch\u1ea5t c\u1ea3n quang, sau \u0111\u00f3 hi\u1ec7n h\u00ecnh v\u00e0 kh\u1eafc \u0103n m\u00f2n \u0111\u1ec3 chuy\u1ec3n m\u1eabu \u0111\u00f3 xu\u1ed1ng v\u1eadt li\u1ec7u b\u00ean d\u01b0\u1edbi\u200b. Qu\u00e1 tr\u00ecnh n\u00e0y \u0111\u01b0\u1ee3c l\u1eb7p l\u1ea1i nhi\u1ec1u l\u1ea7n (th\u01b0\u1eddng 20\u201330 l\u1ea7n) \u0111\u1ec3 t\u1eebng b\u01b0\u1edbc x\u00e2y d\u1ef1ng n\u00ean c\u00e1c t\u1ea7ng linh ki\u1ec7n v\u00e0 k\u1ebft n\u1ed1i c\u1ee7a chip t\u00edch h\u1ee3p\u200b. Th\u1ef1c t\u1ebf, quang kh\u1eafc l\u00e0 c\u00f4ng \u0111o\u1ea1n tr\u1ecdng y\u1ebfu trong ch\u1ebf t\u1ea1o vi m\u1ea1ch, chi\u1ebfm kho\u1ea3ng 30% chi ph\u00ed s\u1ea3n xu\u1ea5t v\u00e0 quy\u1ebft \u0111\u1ecbnh gi\u1edbi h\u1ea1n thu nh\u1ecf k\u00edch th\u01b0\u1edbc linh ki\u1ec7n\u200b<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1020\" height=\"612\" src=\"https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image.png\" alt=\"\" class=\"wp-image-4261\" srcset=\"https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image.png 1020w, https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image-300x180.png 300w, https:\/\/labantrithuc.com\/wp-content\/uploads\/2025\/02\/image-768x461.png 768w\" sizes=\"auto, (max-width: 1020px) 100vw, 1020px\" \/><\/figure>\n\n\n\n<p><strong>C\u00e1c b\u01b0\u1edbc ch\u00ednh trong quang kh\u1eafc:<\/strong> Quy tr\u00ecnh quang kh\u1eafc ti\u00eau chu\u1ea9n bao g\u1ed3m m\u1ed9t chu\u1ed7i b\u01b0\u1edbc tu\u1ea7n t\u1ef1, m\u1ed7i b\u01b0\u1edbc \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c cao. C\u00e1c b\u01b0\u1edbc c\u01a1 b\u1ea3n nh\u01b0 sau\u200b:<\/p>\n\n\n\n<ol class=\"wp-block-list\" start=\"1\">\n<li><strong>Chu\u1ea9n b\u1ecb b\u1ec1 m\u1eb7t wafer:<\/strong> Wafer silicon \u0111\u01b0\u1ee3c l\u00e0m s\u1ea1ch v\u00e0 x\u1eed l\u00fd (lo\u1ea1i b\u1ecf h\u01a1i \u1ea9m, ph\u1ee7 ch\u1ea5t t\u0103ng \u0111\u1ed9 b\u00e1m d\u00ednh) \u0111\u1ec3 ch\u1ea5t c\u1ea3n quang b\u00e1m t\u1ed1t tr\u00ean b\u1ec1 m\u1eb7t\u200b.<\/li>\n\n\n\n<li><strong>Ph\u1ee7 ch\u1ea5t c\u1ea3n quang (photoresist):<\/strong> M\u1ed9t l\u1edbp m\u1ecfng ch\u1ea5t c\u1ea3n quang \u0111\u01b0\u1ee3c ph\u1ee7 \u0111\u1ec1u tr\u00ean wafer b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p quay ph\u1ee7 (spin-coating)\u200b. L\u1edbp n\u00e0y c\u00f3 \u0111\u1ed9 d\u00e0y v\u00e0i tr\u0103m nm v\u00e0 s\u1ebd nh\u1ea1y v\u1edbi \u00e1nh s\u00e1ng chi\u1ebfu.<\/li>\n\n\n\n<li><strong>S\u1ea5y s\u01a1 b\u1ed9 (prebake):<\/strong> Wafer \u0111\u01b0\u1ee3c \u201cnung\u201d nh\u1eb9 \u0111\u1ec3 l\u00e0m bay h\u01a1i dung m\u00f4i v\u00e0 l\u00e0m c\u1ee9ng t\u1ea1m th\u1eddi l\u1edbp c\u1ea3n quang, gi\u00fap \u1ed5n \u0111\u1ecbnh trong qu\u00e1 tr\u00ecnh ph\u01a1i s\u00e1ng.<\/li>\n\n\n\n<li><strong>C\u0103n ch\u1ec9nh v\u00e0 ph\u01a1i s\u00e1ng (exposure):<\/strong> Wafer \u0111\u01b0\u1ee3c \u0111\u01b0a v\u00e0o m\u00e1y in th\u1ea1ch b\u1ea3n. \u00c1nh s\u00e1ng t\u1eed ngo\u1ea1i t\u1eeb ngu\u1ed3n (v\u00ed d\u1ee5 \u0111\u00e8n laser) \u0111\u01b0\u1ee3c h\u1ed9i t\u1ee5 v\u00e0 chi\u1ebfu qua mask ch\u1ee9a m\u1eabu m\u1ea1ch c\u1ea7n in. C\u00e1c v\u00f9ng tr\u00ean mask trong su\u1ed1t cho ph\u00e9p \u00e1nh s\u00e1ng truy\u1ec1n qua v\u00e0 t\u00e1c \u0111\u1ed9ng l\u00ean l\u1edbp c\u1ea3n quang b\u00ean d\u01b0\u1edbi, g\u00e2y <strong>ph\u1ea3n \u1ee9ng quang h\u00f3a<\/strong> l\u00e0m thay \u0111\u1ed5i t\u00ednh tan c\u1ee7a ch\u1ea5t c\u1ea3n quang t\u1ea1i nh\u1eefng v\u00f9ng \u0111\u00f3\u200b. (Hi\u1ec7n nay h\u1ea7u h\u1ebft s\u1eed d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p chi\u1ebfu <strong>Projective<\/strong> qua h\u1ec7 th\u1ea5u k\u00ednh, ph\u00f3ng to thu nh\u1ecf h\u00ecnh \u1ea3nh mask, thay v\u00ec ph\u01b0\u01a1ng ph\u00e1p ti\u1ebfp x\u00fac tr\u1ef1c ti\u1ebfp nh\u01b0 tr\u01b0\u1edbc\u200b).<\/li>\n\n\n\n<li><strong>Hi\u1ec7n \u1ea3nh (development):<\/strong> Wafer sau ph\u01a1i \u0111\u01b0\u1ee3c ng\u00e2m trong dung d\u1ecbch tr\u00e1ng r\u1eeda (developer). C\u00e1c v\u00f9ng ch\u1ea5t c\u1ea3n quang \u0111\u00e3 b\u1ecb \u00e1nh s\u00e1ng l\u00e0m thay \u0111\u1ed5i s\u1ebd h\u00f2a tan v\u00e0 b\u1ecb r\u1eeda tr\u00f4i (\u0111\u1ed1i v\u1edbi lo\u1ea1i c\u1ea3n quang d\u01b0\u01a1ng), ho\u1eb7c ng\u01b0\u1ee3c l\u1ea1i c\u00e1c v\u00f9ng kh\u00f4ng b\u1ecb chi\u1ebfu s\u00e1ng s\u1ebd b\u1ecb h\u00f2a tan (\u0111\u1ed1i v\u1edbi lo\u1ea1i c\u1ea3n quang \u00e2m). K\u1ebft qu\u1ea3 t\u1ea1o n\u00ean hoa v\u0103n ch\u1ea5t c\u1ea3n quang \u0111\u00fang theo m\u1eabu mask tr\u00ean b\u1ec1 m\u1eb7t wafer.<\/li>\n\n\n\n<li><strong>\u0102n m\u00f2n (etching) v\u00e0 truy\u1ec1n m\u1eabu:<\/strong> Hoa v\u0103n v\u1eeba t\u1ea1o ra \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m <strong>m\u1eb7t n\u1ea1 b\u1ea3o v\u1ec7<\/strong> cho b\u01b0\u1edbc \u0103n m\u00f2n plasma ho\u1eb7c ion \u2013 nh\u1eb1m kh\u1eafc xu\u1ed1ng l\u1edbp v\u1eadt li\u1ec7u b\u00ean d\u01b0\u1edbi (oxide, kim lo\u1ea1i ho\u1eb7c silicon) theo \u0111\u00fang m\u1eabu. Ph\u1ea7n v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c che ph\u1ee7 b\u1edfi ch\u1ea5t c\u1ea3n quang s\u1ebd <strong>kh\u00f4ng b\u1ecb \u0103n m\u00f2n<\/strong>, c\u00f2n c\u00e1c v\u00f9ng l\u1ed9 ra s\u1ebd b\u1ecb kh\u1eafc lo\u1ea1i b\u1ecf, t\u1ea1o c\u1ea5u tr\u00fac mong mu\u1ed1n tr\u00ean wafer.<\/li>\n\n\n\n<li><strong>Lo\u1ea1i b\u1ecf c\u1ea3n quang (resist strip):<\/strong> Sau khi m\u1eabu \u0111\u00e3 \u0111\u01b0\u1ee3c kh\u1eafc xu\u1ed1ng l\u1edbp d\u01b0\u1edbi, l\u1edbp c\u1ea3n quang c\u00f2n l\u1ea1i \u0111\u01b0\u1ee3c t\u1ea9y b\u1ecf (th\u01b0\u1eddng b\u1eb1ng plasma oxy ho\u1eb7c dung m\u00f4i). Wafer s\u1eb5n s\u00e0ng cho l\u1edbp ti\u1ebfp theo. Chu\u1ed7i quy tr\u00ecnh n\u00e0y l\u1eb7p l\u1ea1i cho m\u1ed7i l\u1edbp linh ki\u1ec7n c\u1ea7n ch\u1ebf t\u1ea1o.<\/li>\n<\/ol>\n\n\n\n<p>Qu\u00e1 tr\u00ecnh tr\u00ean \u0111\u00f2i h\u1ecfi \u0111\u1ed9 s\u1ea1ch r\u1ea5t cao (ph\u00f2ng s\u1ea1ch) v\u00e0 s\u1ef1 c\u0103n ch\u1ec9nh ch\u00ednh x\u00e1c gi\u1eefa c\u00e1c l\u1edbp mask. M\u1ed7i l\u1edbp pattern m\u1edbi ph\u1ea3i \u0111\u01b0\u1ee3c <strong>canh ch\u1ec9nh (align)<\/strong> v\u1edbi c\u00e1c hoa v\u0103n \u0111\u00e3 c\u00f3 tr\u01b0\u1edbc \u0111\u00f3 tr\u00ean wafer, sai s\u1ed1 ch\u1ec9 trong v\u00e0i nm. S\u1ef1 ch\u1ed3ng l\u1edbp (overlay) n\u00e0y l\u00e0 th\u00e1ch th\u1ee9c then ch\u1ed1t: sai l\u1ec7ch nh\u1ecf c\u00f3 th\u1ec3 l\u00e0m h\u1ecfng c\u1ea5u tr\u00fac m\u1ea1ch.<\/p>\n\n\n\n<p><strong>C\u00e1c lo\u1ea1i photoresist (ch\u1ea5t c\u1ea3n quang):<\/strong> C\u00f3 hai lo\u1ea1i ch\u00ednh l\u00e0 <strong>c\u1ea3n quang d\u01b0\u01a1ng<\/strong> v\u00e0 <strong>c\u1ea3n quang \u00e2m<\/strong>, kh\u00e1c nhau \u1edf c\u00e1ch ph\u1ea3n \u1ee9ng v\u1edbi \u00e1nh s\u00e1ng\u200b:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>C\u1ea3n quang d\u01b0\u01a1ng (Positive resist):<\/strong> D\u01b0\u1edbi t\u00e1c d\u1ee5ng \u00e1nh s\u00e1ng, polymer c\u1ea3m quang <strong>b\u1ecb ph\u00e1 v\u1ee1 m\u1ea1ch<\/strong> ho\u1eb7c bi\u1ebfn \u0111\u1ed5i th\u00e0nh d\u1ea1ng <strong>d\u1ec5 tan<\/strong> trong developer. Do \u0111\u00f3 sau khi ph\u01a1i v\u00e0 tr\u00e1ng r\u1eeda, <strong>ph\u1ea7n \u0111\u00e3 chi\u1ebfu s\u00e1ng s\u1ebd b\u1ecb h\u00f2a tan v\u00e0 m\u1ea5t \u0111i<\/strong>, \u0111\u1ec3 l\u1ed9 b\u1ec1 m\u1eb7t wafer tr\u1ea7n\u200b. Ng\u01b0\u1ee3c l\u1ea1i, v\u00f9ng <strong>kh\u00f4ng b\u1ecb chi\u1ebfu s\u00e1ng<\/strong> v\u1eabn kh\u00f4ng tan v\u00e0 l\u01b0u l\u1ea1i, t\u1ea1o hoa v\u0103n <strong>gi\u1ed1ng y h\u1ec7t<\/strong> m\u1eabu tr\u00ean mask. C\u1ea3n quang d\u01b0\u01a1ng c\u00f3 \u0111\u1ed9 ph\u00e2n gi\u1ea3i cao h\u01a1n, t\u1ea1o \u0111\u01b0\u1ee3c c\u00e1c \u0111\u01b0\u1eddng n\u00e9t r\u1ea5t m\u1ecbn v\u00ec ch\u1ec9 v\u00f9ng b\u1ecb chi\u1ebfu s\u00e1ng m\u1edbi m\u1ec1m ra. H\u1ea7u h\u1ebft c\u00e1c quy tr\u00ecnh hi\u1ec7n \u0111\u1ea1i d\u00f9ng c\u1ea3n quang d\u01b0\u01a1ng nh\u1edd \u01b0u \u0111i\u1ec3m v\u1ec1 \u0111\u1ed9 ph\u00e2n gi\u1ea3i v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c\u200b. V\u00ed d\u1ee5: c\u00e1c h\u1ec7 <strong>DNQ-Novolak<\/strong> (diazonaphthoquinone \u2013 novolac) d\u00f9ng cho \u0111\u00e8n th\u1ee7y ng\u00e2n (i-line 365 nm) hay <strong>chemically amplified resist<\/strong> cho b\u01b0\u1edbc s\u00f3ng 248 nm, 193 nm \u0111\u1ec1u thu\u1ed9c lo\u1ea1i d\u01b0\u01a1ng\u200b.<\/li>\n\n\n\n<li><strong>C\u1ea3n quang \u00e2m (Negative resist):<\/strong> D\u01b0\u1edbi \u00e1nh s\u00e1ng, polymer c\u1ee7a resist s\u1ebd <strong>li\u00ean k\u1ebft ch\u00e9o (cross-link)<\/strong> th\u00e0nh m\u1ea1ng kh\u00f4ng tan trong developer (c\u1ee9ng l\u1ea1i)\u200b. V\u00ec v\u1eady <strong>ph\u1ea7n \u0111\u00e3 chi\u1ebfu s\u00e1ng<\/strong> s\u1ebd <strong>\u1edf l\u1ea1i<\/strong> tr\u00ean wafer sau khi tr\u00e1ng r\u1eeda, c\u00f2n v\u00f9ng <strong>kh\u00f4ng chi\u1ebfu<\/strong> (kh\u00f4ng \u0111\u01b0\u1ee3c \u201cc\u1ee9ng\u201d l\u00ean) s\u1ebd b\u1ecb dung d\u1ecbch h\u00f2a tan cu\u1ed1n \u0111i, t\u1ea1o hoa v\u0103n <strong>ng\u01b0\u1ee3c<\/strong> v\u1edbi mask. C\u1ea3n quang \u00e2m th\u01b0\u1eddng c\u00f3 t\u1ed1c \u0111\u1ed9 nh\u1ea1y s\u00e1ng nhanh h\u01a1n v\u00e0 r\u1ebb h\u01a1n nh\u01b0ng nh\u01b0\u1ee3c \u0111i\u1ec3m l\u00e0 \u0111\u1ed9 ph\u00e2n gi\u1ea3i k\u00e9m \u2013 do xu h\u01b0\u1edbng <strong>tr\u01b0\u01a1ng n\u1edf<\/strong> v\u00e0 <strong>bi\u1ebfn d\u1ea1ng<\/strong> khi r\u1eeda (developer th\u00e2m nh\u1eadp c\u1ea3 v\u00f9ng ch\u01b0a chi\u1ebfu s\u00e1ng g\u00e2y s\u01b0ng, l\u00e0m m\u1edd n\u00e9t pattern)\u200b. V\u00ec l\u00fd do \u0111\u00f3, \u1edf c\u00e1c c\u00f4ng ngh\u1ec7 \u0111\u00f2i h\u1ecfi chi ti\u1ebft r\u1ea5t nh\u1ecf, c\u1ea3n quang \u00e2m \u00edt \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng. Tuy nhi\u00ean c\u1ea3n quang \u00e2m v\u1eabn h\u1eefu \u00edch cho nh\u1eefng \u1ee9ng d\u1ee5ng kh\u00f4ng c\u1ea7n \u0111\u1ed9 ph\u00e2n gi\u1ea3i qu\u00e1 cao nh\u1edd \u01b0u th\u1ebf gi\u00e1 r\u1ebb, \u0111\u1ed9 b\u00e1m d\u00ednh t\u1ed1t v\u00e0 quy tr\u00ecnh d\u1ec5 d\u00e0ng h\u01a1n\u200b.<\/li>\n<\/ul>\n\n\n\n<p>T\u00f3m l\u1ea1i, nguy\u00ean l\u00fd quang kh\u1eafc d\u1ef1a tr\u00ean <strong>thay \u0111\u1ed5i t\u00ednh tan<\/strong> c\u1ee7a v\u1eadt li\u1ec7u c\u1ea3m quang d\u01b0\u1edbi \u00e1nh s\u00e1ng \u0111\u1ec3 t\u1ea1o <strong>m\u1eb7t n\u1ea1 t\u1ea1m th\u1eddi<\/strong> tr\u00ean wafer. M\u1eb7t n\u1ea1 n\u00e0y sau \u0111\u00f3 \u0111\u1ecbnh h\u00ecnh v\u00f9ng s\u1ebd \u0111\u01b0\u1ee3c kh\u1eafc ho\u1eb7c c\u1ea5y gh\u00e9p ion, qua \u0111\u00f3 \u201cin\u201d c\u1ea5u tr\u00fac m\u1ea1ch l\u00ean ch\u1ea5t b\u00e1n d\u1eabn. Nh\u1edd kh\u1ea3 n\u0103ng t\u1ea1o m\u1eabu ch\u00ednh x\u00e1c v\u00e0 l\u1eb7p l\u1ea1i nhi\u1ec1u l\u1ea7n, quang kh\u1eafc cho ph\u00e9p ch\u1ebf t\u1ea1o h\u00e0ng t\u1ef7 linh ki\u1ec7n c\u1ef1c nh\u1ecf tr\u00ean m\u1ed9t chip. Tuy nhi\u00ean, k\u1ef9 thu\u1eadt n\u00e0y c\u0169ng b\u1ecb r\u00e0ng bu\u1ed9c b\u1edfi nh\u1eefng <strong>gi\u1edbi h\u1ea1n v\u1eadt l\u00fd<\/strong>, ti\u00eau bi\u1ec3u l\u00e0 gi\u1edbi h\u1ea1n <strong>nhi\u1ec5u x\u1ea1 \u00e1nh s\u00e1ng<\/strong> \u2013 chi ti\u1ebft nh\u1ecf nh\u1ea5t kh\u00f4ng th\u1ec3 nh\u1ecf h\u01a1n m\u1ed9t m\u1ee9c nh\u1ea5t \u0111\u1ecbnh so v\u1edbi b\u01b0\u1edbc s\u00f3ng \u00e1nh s\u00e1ng s\u1eed d\u1ee5ng\u200b. \u0110\u1ec3 ti\u1ebfp t\u1ee5c thu nh\u1ecf linh ki\u1ec7n, ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn ph\u1ea3i kh\u00f4ng ng\u1eebng c\u1ea3i ti\u1ebfn ngu\u1ed3n s\u00e1ng, v\u1eadt li\u1ec7u v\u00e0 k\u1ef9 thu\u1eadt quang kh\u1eafc, d\u1eabn \u0111\u1ebfn s\u1ef1 ra \u0111\u1eddi c\u1ee7a c\u00e1c c\u00f4ng ngh\u1ec7 quang kh\u1eafc hi\u1ec7n \u0111\u1ea1i nh\u01b0 DUV v\u00e0 EUV.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>1. Nguy\u00ean l\u00fd c\u01a1 b\u1ea3n c\u1ee7a quang kh\u1eafc Quang kh\u1eafc (photolithography) l\u00e0 quy tr\u00ecnh s\u1eed d\u1ee5ng \u00e1nh s\u00e1ng \u0111\u1ec3 t\u1ea1o c\u00e1c hoa v\u0103n vi m\u00f4 tr\u00ean b\u1ec1 m\u1eb7t wafer b\u00e1n d\u1eabn th\u00f4ng qua m\u1ed9t l\u1edbp v\u1eadt li\u1ec7u nh\u1ea1y s\u00e1ng g\u1ecdi l\u00e0 ch\u1ea5t c\u1ea3n quang. V\u1ec1 c\u01a1 b\u1ea3n, quang kh\u1eafc gi\u1ed1ng nh\u01b0 k\u1ef9 thu\u1eadt ch\u1ee5p \u1ea3nh:&#8230;<\/p>\n","protected":false},"author":1,"featured_media":4262,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_kadence_starter_templates_imported_post":false,"_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[3],"tags":[],"class_list":["post-4260","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghe"],"_links":{"self":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts\/4260","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=4260"}],"version-history":[{"count":2,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts\/4260\/revisions"}],"predecessor-version":[{"id":4267,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/posts\/4260\/revisions\/4267"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=\/wp\/v2\/media\/4262"}],"wp:attachment":[{"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=4260"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=4260"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/labantrithuc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=4260"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}